Design and Simulation of On-Line Test Structure for Thermal Conductivity of Polysilicon Thin Films
在线检测多晶硅薄膜热导率测试结构的设计与模拟

An on-line test structure for measuring the thermal conductivity of polysilicon thin films is proposed.The measurement method and thermal modeling are given.The relults are confirmed by ANSYS TM .The method would find applications in the processing line because the vacuum testing circumstances are not required...