%0 Journal Article
%T Design and Simulation of On-Line Test Structure for Thermal Conductivity of Polysilicon Thin Films<br>在线检测多晶硅薄膜热导率测试结构的设计与模拟
%A Xu Gaobin
%A Huang Qing''''an
%A <br>许高斌
%A 黄庆安
%J 半导体学报
%D 2004
%I 
%X An on-line test structure for measuring the thermal conductivity of polysilicon thin films is proposed.The measurement method and thermal modeling are given.The relults are confirmed by ANSYS TM .The method would find applications in the processing line because the vacuum testing circumstances are not required...
%K thermal conductivity
%K surface micromachining technique
%K test structure
%K polysilicon thin films<br>热导率
%K 表面微机械技术
%K 测试结构
%K 多晶硅薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=35435997F86D8697&yid=D0E58B75BFD8E51C&vid=C5154311167311FE&iid=E158A972A605785F&sid=389DA78D878702A9&eid=8D75AD3BD0D1BCC5&journal_id=1674-4926&journal_name=半导体学报&referenced_num=5&reference_num=4