AFM Anode Oxidation of Al2O3 Nano Patterns on Al/SiO2/Si
Al/SiO_2/Si表面Al_2O_3纳米图形的AFM阳极氧化制备方法

AFM anode oxidation is used to fabricate Al 2O 3 nano patterns on Al/SiO 2/Si.The nano pattern as small as 70nm is fabricated by controlling applied voltage and scanning rate of AFM cantilever.The oxidation mechanism with the existence of surface water layer is discussed.The results show AFM anode oxidation is a possible effective method to prepare metal oxidized semiconductor nano devices.