%0 Journal Article
%T AFM Anode Oxidation of Al2O3 Nano Patterns on Al/SiO2/Si<br>Al/SiO_2/Si表面Al_2O_3纳米图形的AFM阳极氧化制备方法
%A Jiao Zheng
%A Li Zhen
%A Wu Minghong
%A Gu Jianzhong
%A Wang Deqing
%A <br>焦正
%A 李珍
%A 吴明红
%A 顾建忠
%A 王德庆
%J 半导体学报
%D 2004
%I 
%X AFM anode oxidation is used to fabricate Al 2O 3 nano patterns on Al/SiO 2/Si.The nano pattern as small as 70nm is fabricated by controlling applied voltage and scanning rate of AFM cantilever.The oxidation mechanism with the existence of surface water layer is discussed.The results show AFM anode oxidation is a possible effective method to prepare metal oxidized semiconductor nano devices.
%K nano pattern
%K nanowire
%K anode oxidation
%K AFM<br>纳米图形
%K 纳米线
%K 阳极氧化
%K AFM
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=F62F962672ED3373&yid=D0E58B75BFD8E51C&vid=C5154311167311FE&iid=708DD6B15D2464E8&sid=AA2E209AD442C5CC&eid=AA9D0A3238B80655&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=9