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半导体学报 2005
Mosaic Structure and Heating Treatment of Passivated HgCdTe
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Abstract:
The epitaxial layer of HgCdTe passivated by CdTe is investigated with high-resolution two-dimensional mapping of X-ray diffraction.It is found that the wafer of HgCdTe is bended and mosaic structure is also observed because of the sputtered passivation layer.The bended wafer and mosaic structure can be recovered by suitable heating treatment.