%0 Journal Article
%T Mosaic Structure and Heating Treatment of Passivated HgCdTe<br>HgCdTe钝化过程中形成的镶嵌结构及其热处理效应
%A Sun Tao
%A Wang Qingxue
%A Chen Wenqiao
%A Liang Jinsui
%A Chen Xingguo
%A Hu Xiaoning
%A and Li Yanjin
%A <br>孙涛
%A 王庆学
%A 陈文桥
%A 梁晋穗
%A 陈兴国
%A 胡晓宁
%A 李言谨
%J 半导体学报
%D 2005
%I 
%X The epitaxial layer of HgCdTe passivated by CdTe is investigated with high-resolution two-dimensional mapping of X-ray diffraction.It is found that the wafer of HgCdTe is bended and mosaic structure is also observed because of the sputtered passivation layer.The bended wafer and mosaic structure can be recovered by suitable heating treatment.
%K HgCdTe
%K CdTe<br>钝化
%K 二维点阵
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=810FD2CE77DCA8E0&yid=2DD7160C83D0ACED&vid=96C778EE049EE47D&iid=CA4FD0336C81A37A&sid=95D537AC89B28832&eid=5C3443B19473A746&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=14