Effects of Argon Gas Flow Rate on Oxygen and Carbon Concentration in CZSi Crystals
硅单晶生长中氩气流动对氧碳含量的影响

By modifying the pattern and velocity of argon flow,the silicon crystals with different oxygen and carbon contents are obtained.Through numeric simulation,the streamline of argon gas flow is plotted for the first time,with the optimum condition of argon flow with the lowest oxygen and carbon content obtained.