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半导体学报 2005
Compositional Uniformity of LPE-HgCdTe Films
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Abstract:
HgCdTe films with large size are grown from Te rich solutions on CdZnTe substrate with sliding boat liquid phase epitaxial method.Solid HgTe is used to compensate the loss of Hg from the solution.Accurate temperature control and cooling rate are applied in the growth process.The result shows that the HgCdTe films have good uniformity and reproducibility of composition in spite of the large size.