%0 Journal Article
%T Compositional Uniformity of LPE-HgCdTe Films<br>液相外延HgCdTe薄膜组分均匀性的研究
%A Ma Qinghua
%A Chen Jiancai
%A Wu Jun
%A Kong Jincheng
%A Yang Yu
%A Ji Rongbin
%A <br>马庆华
%A 陈建才
%A 吴军
%A 孔金丞
%A 杨宇
%A 姬荣斌
%J 半导体学报
%D 2005
%I 
%X HgCdTe films with large size are grown from Te rich solutions on CdZnTe substrate with sliding boat liquid phase epitaxial method.Solid HgTe is used to compensate the loss of Hg from the solution.Accurate temperature control and cooling rate are applied in the growth process.The result shows that the HgCdTe films have good uniformity and reproducibility of composition in spite of the large size.
%K LPE
%K HgCdTe
%K compositional uniformity<br>液相外延
%K HgCdTe
%K 组分均匀性
%K 液相外延法
%K HgCdTe
%K 膜组分
%K 组分均匀性
%K Films
%K 长波
%K 生长速率
%K 温度
%K 选择
%K 薄膜
%K 大面积
%K 外延生长
%K 溶液
%K 补偿
%K 固态
%K CdZnTe
%K 平推
%K 利用
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=EBCDF465FED3C19A&yid=2DD7160C83D0ACED&vid=96C778EE049EE47D&iid=38B194292C032A66&sid=F9A6B6F259CE5121&eid=AF0641F74554D706&journal_id=1674-4926&journal_name=半导体学报&referenced_num=1&reference_num=9