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半导体学报 2000
MOS Structure Charge Control Model Based on Surface Layer Effective Density-of-States
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Abstract:
Based on the analysis of the distribution of inversion layer carrier in the space charge region of MOS structure, the concept of Surface Layer Effective Density\|of\|States (SLEDOS) is proposed. Then a new charge control model is established in which the effects of inversion layer carrier distribution on surface potential are included. In this model, the effect of surface potential change after strong inversion on carrier sheet density is included and a new efficient iterative method is adopted. The model is with high efficiency and accuracy.