A Novel Anchor for Microbeam with Perfect Fixed-End Boundary Conditions
一种能满足MEMS微梁固支边界条件的锚

In MEMS community,micro-beams are often used to extract material properties or build various devices,but the typical step-up anchors obtained from surface-micromachined process are not often well-defined fixed-ends.In order to get perfect fixed-ends,a novel anchor is presented which can be manufactured only by modifying layout,and no modification in the fabrication process is necessary.