%0 Journal Article
%T A Novel Anchor for Microbeam with Perfect Fixed-End Boundary Conditions<br>一种能满足MEMS微梁固支边界条件的锚
%A Rong Hua
%A Huang Qing'an
%A Nie Meng
%A Li Weihua
%A <br>戎华
%A 黄庆安
%A 聂萌
%A 李伟华
%J 半导体学报
%D 2004
%I 
%X In MEMS community,micro-beams are often used to extract material properties or build various devices,but the typical step-up anchors obtained from surface-micromachined process are not often well-defined fixed-ends.In order to get perfect fixed-ends,a novel anchor is presented which can be manufactured only by modifying layout,and no modification in the fabrication process is necessary.
%K surface micromachining
%K fixed-end boundary condition
%K anchor
%K layout<br>表面微加工
%K 固支边界条件
%K 锚
%K 版图
%K MEMS
%K 微梁
%K 固支边界条件
%K Boundary
%K Conditions
%K Perfect
%K Microbeam
%K Anchor
%K 软件模拟
%K 结构新
%K 问题
%K 误差
%K 器件设计
%K 台阶型
%K 表面微加工工艺
%K 提取
%K 材料参数
%K 应用
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=BA3E1727506E7B56&yid=D0E58B75BFD8E51C&vid=C5154311167311FE&iid=B31275AF3241DB2D&sid=E008F9AD6D4B96EF&eid=2868AE484E7BAD6B&journal_id=1674-4926&journal_name=半导体学报&referenced_num=2&reference_num=6