Effects of Non-abrupt Interface on Waveguide Properties of SiGe/Si MQW Photodetector

With the development of MBE and MOCVD techniques,the MQW waveguide has become an important structure in some optoelectronic devices1~3].SiGe/SiMQW waveguide photodetectors have been demonstrated.By using the SiGe/Si MQW structures as natural waveguides,a high quantum efficie...