Study on IR SPV Spectram of the SnO_2 Films
SnO_2薄膜的红外光谱和表面光电压谱的研究
Dai Guorui/Jilin University,
ChangchunJiang Yueshun/Jilin University,
ChangchunWang Yajing/Jilin University,
ChangchunDong Xijuan/Jilin University,
ChangchunTang Daxin/Jilin University,
ChangchunLi Tiejin/Jilin University,
Changchun,
戴国瑞,
姜月顺,
王雅静,
董玺娟,
汤大新,
李铁津
Keywords: SnO_2 films,Infrared spectroscopy,Sensing mechanism,Surface photovoltaic spectroscopy
SnO2,薄膜,红外光谱,表面光电压谱
Abstract:
本文采用PECVD方法制备了SnO_2薄膜,对薄膜进行了红外光谱和表面光电压谱测量发现,薄膜表面化学吸附O_2~(2-)和O~-离子基团,成为反应活性中心、电子转移的桥梁,推测了SnO_2表面与乙醇气体敏感反应历程.SnO_(?)薄膜淀积在n-Si上,使其表面光电压信号增强二个数量级以上,我们认为是SnO_2/n-Si异质结作用和消反射作用的结果.
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