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半导体学报 2001
Optimization of Deep-Etched,Single-Mode GaAs/GaAlAs Optical Rib Waveguides Using Discrete Spectral Index Method
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Abstract:
A more detailed analysis of deep-etched,single-mode GaAs/GaAlAs multiple-layer optical rib waveguides is presented using the discrete spectral index method (DSIM).The fabrication tolerance of the obtained low-loss,single-mode optical rib waveguides with a large mode size is analysed as well.The result indicates that single-mode rib waveguides obtained by this method have large fabrication tolerance.