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ISSN: 2333-9721
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Optimization of Deep-Etched,Single-Mode GaAs/GaAlAs Optical Rib Waveguides Using Discrete Spectral Index Method
离散谱折射率法优化设计深刻蚀、单模GaAs/GaAlAs脊形光波导

Keywords: DSIM,deep etching,GaAs/GaAlAs
离散谱折射率法
,深刻蚀,GaAs/GaAlAs

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Abstract:

A more detailed analysis of deep-etched,single-mode GaAs/GaAlAs multiple-layer optical rib waveguides is presented using the discrete spectral index method (DSIM).The fabrication tolerance of the obtained low-loss,single-mode optical rib waveguides with a large mode size is analysed as well.The result indicates that single-mode rib waveguides obtained by this method have large fabrication tolerance.

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