%0 Journal Article
%T Optimization of Deep-Etched,Single-Mode GaAs/GaAlAs Optical Rib Waveguides Using Discrete Spectral Index Method<br>离散谱折射率法优化设计深刻蚀、单模GaAs/GaAlAs脊形光波导
%A MA Hui-lian
%A YANG Jian-yi
%A JIANG Xiao-qing
%A WANG Ming-hua
%A <br>马慧莲
%A 杨建义
%A 江晓清
%A 王明华
%J 半导体学报
%D 2001
%I 
%X A more detailed analysis of deep-etched,single-mode GaAs/GaAlAs multiple-layer optical rib waveguides is presented using the discrete spectral index method (DSIM).The fabrication tolerance of the obtained low-loss,single-mode optical rib waveguides with a large mode size is analysed as well.The result indicates that single-mode rib waveguides obtained by this method have large fabrication tolerance.
%K DSIM
%K deep etching
%K GaAs/GaAlAs<br>离散谱折射率法
%K 深刻蚀
%K GaAs/GaAlAs
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=271F168F82DB2703&yid=14E7EF987E4155E6&vid=BC12EA701C895178&iid=E158A972A605785F&sid=283B38DAD0D068F3&eid=5CB576B96D187F64&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=6