Etching Technique of Diffraction Gratings in InP and InGaAsP
InP和InGaAsP晶体上衍射光栅的刻制技术
Zheng Yuhong/Institute of Semiconductors,
Academia SinicaMiao Yubo/Institute of Semiconductors,
Academia SinicaTian Huiliang/Institute of Semiconductors,
Academia SinicaSi Yuancheng/Institute of Semiconductors,
Academia SinicaZhang Jingyuan/Institute of Semiconductors,
Academia Sinica,
郑育红,
缪育博,
田慧良,
姒元宬,
张静媛
Keywords: InP,InGaAsP,Submicron gratings,DFB laser
InP,InGaAsP,亚微米衍射光栅,DFB激光器
Abstract:
采用全息光刻的技术,在InP 和InGaAsP晶体上刻制亚微米衍射光栅,获得较好的重复性和均匀性,并已应用于研制长波长分布反馈激光器.
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