%0 Journal Article
%T Etching Technique of Diffraction Gratings in InP and InGaAsP<br>InP和InGaAsP晶体上衍射光栅的刻制技术
%A Zheng Yuhong/Institute of Semiconductors
%A Academia SinicaMiao Yubo/Institute of Semiconductors
%A Academia SinicaTian Huiliang/Institute of Semiconductors
%A Academia SinicaSi Yuancheng/Institute of Semiconductors
%A Academia SinicaZhang Jingyuan/Institute of Semiconductors
%A Academia Sinica
%A <br>郑育红
%A 缪育博
%A 田慧良
%A 姒元宬
%A 张静媛
%J 半导体学报
%D 1988
%I 
%X 采用全息光刻的技术,在InP 和InGaAsP晶体上刻制亚微米衍射光栅,获得较好的重复性和均匀性,并已应用于研制长波长分布反馈激光器.
%K InP
%K InGaAsP
%K Submicron gratings
%K DFB laser<br>InP
%K InGaAsP
%K 亚微米衍射光栅
%K DFB激光器
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=7AEF2EFEEBAD0C61&yid=0702FE8EC3581E51&vid=9CF7A0430CBB2DFD&iid=38B194292C032A66&sid=407C905D8F0449C4&eid=F416A9924F23B020&journal_id=1674-4926&journal_name=半导体学报&referenced_num=1&reference_num=0