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半导体学报 1989
Electronic Structure and Formation of MoSi_2 Silicide
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Abstract:
The properties of electronic structure and formations of MoSi_2 silicide prepared by co-sputtering Mo and Si atoms on silicon substrates under the condition of the steady thermal an-nealing are investigated with the techniques including XPS,UPS,AES,X-ray diffraction andRamman scattering spectroscopy.