Study on Crystal Perfection of Semiconductor Surfaces by SEM Electron Path Patterns
半导体表面晶体完整性的SEM电子通道花样研究

Various GaAs crystal surfaces have been investigated with SEM electron passage patternmethod. Crystallography annotations have been made, and a standard to evaluate the crystalperfection has been defined. The method can be widely used for examining and appraisingthe crystal perfection of semiconductor surfaces.