%0 Journal Article
%T Study on Crystal Perfection of Semiconductor Surfaces by SEM Electron Path Patterns<br>半导体表面晶体完整性的SEM电子通道花样研究
%A Qiu Sujuan/The th Institute of Ministry of Mochinery & Electronics IndustriesLin Qiquan/The th Institute of Ministry of Mochinery & Electronics Industries
%A <br>邱素娟
%A 林奇全
%J 半导体学报
%D 1991
%I 
%X Various GaAs crystal surfaces have been investigated with SEM electron passage patternmethod. Crystallography annotations have been made, and a standard to evaluate the crystalperfection has been defined. The method can be widely used for examining and appraisingthe crystal perfection of semiconductor surfaces.
%K Electron passage photograph
%K Crystal-band
%K Crystal-surface
%K Crystal perfection
%K GaAs<br>GaAs晶体
%K SEM
%K 电子通道像
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=B896E64443FCF0F2&yid=116CB34717B0B183&vid=59906B3B2830C2C5&iid=CA4FD0336C81A37A&sid=EA389574707BDED3&eid=DB817633AA4F79B9&journal_id=1674-4926&journal_name=半导体学报&referenced_num=0&reference_num=1