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半导体学报 2004
A Novel Deformable Mirror Based on MEMS Technology
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Abstract:
The design and fabrication of novel deformable mirror based on silicon micromach ining technology is presented.A deformable mirror with 900 square of millimeters effective reflecting surface and 49 electrostatic actuator s is fabricated successfully.The measured results show that the relationship be tween the deflection of the mirror and the voltage applied agrees well with the simulation result.
