%0 Journal Article
%T A Novel Deformable Mirror Based on MEMS Technology<br>基于MEMS技术的一种新型可变形反射镜
%A Yu Hongbin
%A Chen Haiqing
%A Zhu Zimin
%A Zhang Dacheng
%A Li Ting
%A <br>余洪斌
%A 陈海清
%A 竺子民
%A 张大成
%A 李婷
%J 半导体学报
%D 2004
%I 
%X The design and fabrication of novel deformable mirror based on silicon micromach ining technology is presented.A deformable mirror with 900 square of millimeters effective reflecting surface and 49 electrostatic actuator s is fabricated successfully.The measured results show that the relationship be tween the deflection of the mirror and the voltage applied agrees well with the simulation result.
%K deformable mirror
%K bulk micromachining
%K electrostatic actuating
%K resonant frequency<br>可变形反射镜
%K 体微加工
%K 静电驱动
%K 响应频率
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=025C8057C4D37C4BA0041DC7DE7C758F&aid=FBD3E2D835D4D211&yid=D0E58B75BFD8E51C&vid=C5154311167311FE&iid=9CF7A0430CBB2DFD&sid=B8D8B337883846D1&eid=E2D70FDCD65737D1&journal_id=1674-4926&journal_name=半导体学报&referenced_num=4&reference_num=10