Investigation of Structural and Physical Properties of Pt/Pb(Zr_(0.4)Ti_(0.6))O_3/ITO Capacitors Fabricated on Glass Substrate
玻璃基Pt/Pb(Zr_(0.4)Ti_(0.6))O_3/ITO电容器的结构及物理性能研究

Pt/Pb(Zr0.4Ti0.6)O3(PZT)/ITO capacitors were fabricated on glass substrate,where PZT film was prepared by sol-gel method.The structural and physical properties of Pt/PZT/ITO capacitors were investigated.The microstructural,electrical and optical properties of Pt/PZT/ITO capacitors were characterized by X-ray diffraction(XRD),ferroelectric tester,UV-spectrophotometer,respectively.It is found that PZT is highly(101) oriented and well crystallized.Ferroelectric measurements indicate that Pt/PZT/ITO capacitor,m...