%0 Journal Article
%T Investigation of Structural and Physical Properties of Pt/Pb(Zr_(0.4)Ti_(0.6))O_3/ITO Capacitors Fabricated on Glass Substrate
玻璃基Pt/Pb(Zr_(0.4)Ti_(0.6))O_3/ITO电容器的结构及物理性能研究
%A ZHOU Yang
%A CHENG Chun-Sheng
%A ZHAO Jing-Wei
%A ZHENG Hong-Fang
%A ZHAO Qing-Xun
%A PENG Ying-Cai
%A LIU Bao-Ting
%A
周阳
%A 程春生
%A 赵敬伟
%A 郑红芳
%A 赵庆勋
%A 彭英才
%A 刘保亭
%J 无机材料学报
%D 2010
%I Science Press
%X Pt/Pb(Zr0.4Ti0.6)O3(PZT)/ITO capacitors were fabricated on glass substrate,where PZT film was prepared by sol-gel method.The structural and physical properties of Pt/PZT/ITO capacitors were investigated.The microstructural,electrical and optical properties of Pt/PZT/ITO capacitors were characterized by X-ray diffraction(XRD),ferroelectric tester,UV-spectrophotometer,respectively.It is found that PZT is highly(101) oriented and well crystallized.Ferroelectric measurements indicate that Pt/PZT/ITO capacitor,m...
%K Pt/PZT/ITO
%K sol-gel method
%K electric property
Pt/PZT/ITO
%K 溶胶凝胶法
%K 电学性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=214570F8A51824B828C7B5685B28ACE3&yid=140ECF96957D60B2&vid=C5154311167311FE&iid=38B194292C032A66&sid=0C191C6ECF79047F&eid=28F9D9CF04F424FF&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=0&reference_num=4