Performance Analysis of Cluster Tool with Non-Revisiting in Semiconductor Manufacturing
半导体制造中具有非重入过程的自动组合装置的性能分析

A colored timed resource-oriented Petri net (CTROPN) is powerful tool to simulate the systems' resource distribution. It is developed to model the cluster tools in semiconductor manufacturing. Since each module in a cluster tool corresponds an unique place p in CTROPN, it is structurally simple and concise. Through modeling the qualitative and temporal behavior of the cluster tools with non-revisiting. The initial transient behavior, steady-state behavior and the final transient behavior can all be investigated through a single model.