%0 Journal Article
%T Performance Analysis of Cluster Tool with Non-Revisiting in Semiconductor Manufacturing<br>半导体制造中具有非重入过程的自动组合装置的性能分析
%A BAI Li-ping
%A WU Nai-qi
%A <br>白丽平
%A 伍乃骐
%J 系统工程理论与实践
%D 2005
%I 
%X A colored timed resource-oriented Petri net (CTROPN) is powerful tool to simulate the systems' resource distribution. It is developed to model the cluster tools in semiconductor manufacturing. Since each module in a cluster tool corresponds an unique place p in CTROPN, it is structurally simple and concise. Through modeling the qualitative and temporal behavior of the cluster tools with non-revisiting. The initial transient behavior, steady-state behavior and the final transient behavior can all be investigated through a single model.
%K cluster tool
%K Petri net
%K modeling
%K process with non-revisiting<br>自动组合装置
%K Petri网
%K 建模
%K 非重入过程
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=01BA20E8BA813E1908F3698710BBFEFEE816345F465FEBA5&cid=962324E222C1AC1D&jid=1D057D9E7CAD6BEE9FA97306E08E48D3&aid=084A32584E324282&yid=2DD7160C83D0ACED&vid=C5154311167311FE&iid=B31275AF3241DB2D&sid=708DD6B15D2464E8&eid=13553B2D12F347E8&journal_id=1000-6788&journal_name=系统工程理论与实践&referenced_num=1&reference_num=31