Influence of IBED Testing Parameters on Cr N Coating Structure
离子束增强沉积工艺参数对Cr-N膜层组织结构的影响

This paper studies the structure of IBED Cr-N coatings with different parameters such as N partial pressure, N ions bombarding energy and N ions/Cr atoms ratio. The results show that the chemical composition and structure of the coatings are mainly determined by N partial pressure. According to N partial pressure increasing, there are an increase of CrN phase and a decrease of Cr and Cr2N phase. The grain orientations of the coatings are affected by bombarding energy. When N ions/Cr atoms ratio changed from 1.45×10-2 to 5.87×10-2, high N ion flux of bombarding will result in acceleration of sputtering away from the coated CrN layer as well as its decomposition. In the mean time Cr2O3 is easy to be produced in the layer.