%0 Journal Article
%T Influence of IBED Testing Parameters on Cr N Coating Structure<br>离子束增强沉积工艺参数对Cr-N膜层组织结构的影响
%A TANG Bin
%A LIU Dao-Xin
%A HU Nai-Sai
%A HE Jia-Wen
%A <br>唐宾
%A 刘道新
%A 胡奈赛
%A 何家文
%J 无机材料学报
%D 1999
%I Science Press
%X This paper studies the structure of IBED Cr-N coatings with different parameters such as N partial pressure, N ions bombarding energy and N ions/Cr atoms ratio. The results show that the chemical composition and structure of the coatings are mainly determined by N partial pressure. According to N partial pressure increasing, there are an increase of CrN phase and a decrease of Cr and Cr2N phase. The grain orientations of the coatings are affected by bombarding energy. When N ions/Cr atoms ratio changed from 1.45×10-2 to 5.87×10-2, high N ion flux of bombarding will result in acceleration of sputtering away from the coated CrN layer as well as its decomposition. In the mean time Cr2O3 is easy to be produced in the layer.
%K IBED
%K coating
%K Cr
%K N
%K structure<br>离子束增强沉积
%K 镀层
%K Cr-N
%K 组织结构
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=2CE65B91560BE4F62B915FD59DA90C83&yid=B914830F5B1D1078&vid=F3583C8E78166B9E&iid=E158A972A605785F&sid=2EAE52BA5B1222A9&eid=1D5555D0B4345CA8&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=0&reference_num=12