A Technique of Burn-out for Low Temperature Cofired AlN Multilayer Substrates
一种低温共烧AlN陶瓷基片的排胶技术

A technique of burn-out for low temperature cofired AlN multilayer substrates was introduced,which consist of high thermal conductivity AlN ceramics and metal W. The effect of the evolutionof carbon during burn-out on AlN sintering characteristics and microstructure was studied. Theresults showed that two-step burn-out process may solve the contradiction between W oxidationand residual carbon.