%0 Journal Article
%T A Technique of Burn-out for Low Temperature Cofired AlN Multilayer Substrates<br>一种低温共烧AlN陶瓷基片的排胶技术
%A WU Yin
%A ZHOU He-Ping
%A LIU Yan-Cheng
%A MIAO Wei-Guo
%A <br>吴音
%A 周和平
%A 刘耀诚
%A 缪卫国
%J 无机材料学报
%D 1998
%I Science Press
%X A technique of burn-out for low temperature cofired AlN multilayer substrates was introduced,which consist of high thermal conductivity AlN ceramics and metal W. The effect of the evolutionof carbon during burn-out on AlN sintering characteristics and microstructure was studied. Theresults showed that two-step burn-out process may solve the contradiction between W oxidationand residual carbon.
%K aluminium nitride
%K low temperature cofire
%K binder burn-out
%K residual carbon<br>AlN陶瓷
%K 低温共烧
%K 排胶
%K 残余碳
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=EB290F7852E805ED89D555F68A0CCB79&yid=8CAA3A429E3EA654&vid=FC0714F8D2EB605D&iid=38B194292C032A66&sid=7D6CD8918B045FD4&eid=8ACD9060100C26F1&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=2&reference_num=10