Progress of Study on ZnO Thin Film and its Properties
ZnO薄膜及其性能研究进展

ZnO thin films are the materials with many excellent properties such as piezoeletricity, conductivity, optical absorption and emission, gas-sensitivity, and highly nonlinear voltage-current characteristics. They have a wide variety of applications such as transparent conductors, luminescence diode, window materials for solar cells, optical wave guides, phosphor for monochrome field emission displays, piezoelectric transducers in the GHz range, surface acoustic wave devices, micro-sensors and micro-actuators, and low-voltage varistors. There are many methods for the preparation of ZnO thin films, and each has its advantages and disadvantages. The properties of ZnO thin films depend on the dopants and the preparation conditions. This paper reviews the preparations and properties of ZnO thin films, and discusses their development prospects.