%0 Journal Article
%T Progress of Study on ZnO Thin Film and its Properties<br>ZnO薄膜及其性能研究进展
%A HUANG Yan-Qiu
%A LIU Mei-Dong
%A ZENG Yi-Ke
%A LIU Shao-Bo
%A <br>黄焱球
%A 刘梅冬
%A 曾亦可
%A 刘少波
%J 无机材料学报
%D 2001
%I Science Press
%X ZnO thin films are the materials with many excellent properties such as piezoeletricity, conductivity, optical absorption and emission, gas-sensitivity, and highly nonlinear voltage-current characteristics. They have a wide variety of applications such as transparent conductors, luminescence diode, window materials for solar cells, optical wave guides, phosphor for monochrome field emission displays, piezoelectric transducers in the GHz range, surface acoustic wave devices, micro-sensors and micro-actuators, and low-voltage varistors. There are many methods for the preparation of ZnO thin films, and each has its advantages and disadvantages. The properties of ZnO thin films depend on the dopants and the preparation conditions. This paper reviews the preparations and properties of ZnO thin films, and discusses their development prospects.
%K ZnO thin film
%K preparation methods
%K properties
%K development prospects<br>制备
%K 氧化锌薄膜
%K 射频溅射
%K 双离子束溅射沉积
%K 电子束蒸发沉积
%K CVD
%K Sol－gel
%K 光电性质
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=638F5B469C409B83&yid=14E7EF987E4155E6&vid=7801E6FC5AE9020C&iid=38B194292C032A66&sid=AFB2C35009D5D191&eid=21D8CE17EE5EE354&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=13&reference_num=29