Recent Developments of Surface Coatings and Optical Fabrication of Silicon Carbide
碳化硅表面改性和光学镜面加工的研究现状

Surface coating and exploring new fabrication methods are two kinds of ordinary processes to achieve the fine optical surface of silicon carbide. Two main coating techniques of silicon carbidebased materials, CVD SiC and PVD Si on SiC surface are introduced, and the recent developments of silicon carbide optical fabrication methods are reviewed in detail.