%0 Journal Article
%T Recent Developments of Surface Coatings and Optical Fabrication of Silicon Carbide<br>碳化硅表面改性和光学镜面加工的研究现状
%A LIU Gui-Ling
%A HUANG Zheng-Ren
%A LIU Xue-Jian
%A DONG Shao-Ming
%A JIANG Dong-Liang
%A <br>刘桂玲
%A 黄政仁
%A 刘学建
%A 董绍明
%A 江东亮
%J 无机材料学报
%D 2007
%I Science Press
%X Surface coating and exploring new fabrication methods are two kinds of ordinary processes to achieve the fine optical surface of silicon carbide. Two main coating techniques of silicon carbidebased materials, CVD SiC and PVD Si on SiC surface are introduced, and the recent developments of silicon carbide optical fabrication methods are reviewed in detail.
%K silicon carbide
%K surface coatings
%K optical fabrication<br>碳化硅
%K 表面改性
%K 光学镜面加工
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=D72B35F8EDF8D70F&yid=A732AF04DDA03BB3&vid=BC12EA701C895178&iid=94C357A881DFC066&sid=CA122BD5B2FF2137&eid=786A9BAE5CF9B9EE&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=0&reference_num=55