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Research Status and Development of Superhard Nanocomposite Films
纳米复合超硬薄膜的研究现状

Keywords: superhard films,nanocomposite structure,CVD,magnetron sputtering
超硬薄膜
,纳米复合结构,CVD,磁控溅射

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Abstract:

Superhard nanocomposite films are attracting more and more interests due to their excellent mechanical and chemical properties since S. Veprek et al. presented the concept in 1994. The concept, classification, superhard mechanisms, synthesis technologies and processes, properties, applications, and development of superhard nanocomposite films were reviewed in this paper.

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