%0 Journal Article
%T Research Status and Development of Superhard Nanocomposite Films<br>纳米复合超硬薄膜的研究现状
%A ZHAO Hong-Yu
%A FAN Qiu-Lin
%A SONG Li-Xin
%A SHI Er-Wei
%A HU Xing-Fang
%A <br>赵红雨
%A 范秋林
%A 宋力昕
%A 施尔畏
%A 胡行方
%J 无机材料学报
%D 2004
%I Science Press
%X Superhard nanocomposite films are attracting more and more interests due to their excellent mechanical and chemical properties since S. Veprek et al. presented the concept in 1994. The concept, classification, superhard mechanisms, synthesis technologies and processes, properties, applications, and development of superhard nanocomposite films were reviewed in this paper.
%K superhard films
%K nanocomposite structure
%K CVD
%K magnetron sputtering<br>超硬薄膜
%K 纳米复合结构
%K CVD
%K 磁控溅射
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=E99A3EE42E0F36F8&yid=D0E58B75BFD8E51C&vid=2A8D03AD8076A2E3&iid=CA4FD0336C81A37A&sid=9CF7A0430CBB2DFD&eid=7801E6FC5AE9020C&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=8&reference_num=30