Sputtering Deposition and X-ray Photoelectron Spectroscopy Study for the ZnS Thin Film
ZnS薄膜的溅射沉积及其XPS研究

The ZnS film was grown on HgCdTe surface by using the low-temperature ion beam sputtering technique. Zn and S elements in the sputtering ZnS film sample were studied and compared with those in the evaporating ZnS film by using X-ray photoelectron spectroscopy (XPS) technique. It is proved that the constituent elements are homogeneous, and the deposition of element Zn, S cannot be detected in the sputtering ZnS film.