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OALib Journal期刊
ISSN: 2333-9721
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Time Domain Dielectric spectra of depletion Layer
耗尽层的时域介电谱

Keywords: time domain dielectric spectrum,depletion layer,slica,silicon single crystal
时域介电谱
,耗尽层,二氧化硅,硅单晶,半导体

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Abstract:

Because of slow polarization and non-linear effects, the dynamic properties of Metal-Semiconductor-Insulator-Metal (MSIM) layer were obtained incorrectly by frequency domian spectra with sinusoidal current. For this structure, time domain dielectric spectra can distinguish the effects reliably between contact and insulating layer of MOS structure. More important information of space charges motion can also be obtained by this method.

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