%0 Journal Article
%T Time Domain Dielectric spectra of depletion Layer<br>耗尽层的时域介电谱
%A CHEN Min
%A SUN Shao-Feng
%A LI Jing-De
%A <br>陈敏
%A 孙少锋
%A 李景德
%J 无机材料学报
%D 1999
%I Science Press
%X Because of slow polarization and non-linear effects, the dynamic properties of Metal-Semiconductor-Insulator-Metal (MSIM) layer were obtained incorrectly by frequency domian spectra with sinusoidal current. For this structure, time domain dielectric spectra can distinguish the effects reliably between contact and insulating layer of MOS structure. More important information of space charges motion can also be obtained by this method.
%K time domain dielectric spectrum
%K depletion layer
%K slica
%K silicon single crystal<br>时域介电谱
%K 耗尽层
%K 二氧化硅
%K 硅单晶
%K 半导体
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=6C415D0008AB5FB6&yid=B914830F5B1D1078&vid=F3583C8E78166B9E&iid=38B194292C032A66&sid=09AA1448D1EAF9C1&eid=84A93BA251D28205&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=0&reference_num=7