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ISSN: 2333-9721
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Advances in the Study of Preparation and Properties of Carbon Nitride
氮化碳薄膜制备及性能研究进展

Keywords: carbon nitride,superhard films,process,properties
氮化碳
,超硬膜,制备,工艺,性能

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Abstract:

A detailed review was made on the structure of the carbon nitride together with its preparation process such as sputtering, chemical vapor deposition, ion assisted deposition and laser ablation.The resulting mechanical, electronic and optical properties were discussed, followed by the analysis for further studies.

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