%0 Journal Article
%T Advances in the Study of Preparation and Properties of Carbon Nitride<br>氮化碳薄膜制备及性能研究进展
%A XIAO Xing-Cheng
%A SONG Li-Xin
%A HU Xing-Fang
%A <br>肖兴成
%A 宋力昕
%A 胡行方
%J 无机材料学报
%D 1999
%I Science Press
%X A detailed review was made on the structure of the carbon nitride together with its preparation process such as sputtering, chemical vapor deposition, ion assisted deposition and laser ablation.The resulting mechanical, electronic and optical properties were discussed, followed by the analysis for further studies.
%K carbon nitride
%K superhard films
%K process
%K properties<br>氮化碳
%K 超硬膜
%K 制备
%K 工艺
%K 性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=4C2F8BC1B09D5D22&yid=B914830F5B1D1078&vid=F3583C8E78166B9E&iid=38B194292C032A66&sid=5957D6E0A50D26B5&eid=381FB4265090A8E0&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=1&reference_num=39