Pulsed-laser-arc Deposition of Diamond Like Carbon Films
利用脉冲激光真空弧沉积技术制备类金刚石薄膜

Pulsed-laser-arc deposition technique was introduced. Diamond like carbon (DLC) films were deposited on Si<111> and Si<100> respectively. Results of laser raman spectroscopy showed that the as-deposit films were amorphous, having obvious sp3 structure. Meanwhile, surface topography and micro-tribological character were investigated by using atomic force microscope and nano-scratch tester. The results show that the surface microstructure and micro-tribological character of the film deposited on Si<100> is better than that deposited on Si<111>. The average friction coefficient of the film on Si<100> is 0.036.