%0 Journal Article
%T Pulsed-laser-arc Deposition of Diamond Like Carbon Films<br>利用脉冲激光真空弧沉积技术制备类金刚石薄膜
%A JIANG Na-Na
%A SHAO Tian-Min
%A CHEN Da-Rong
%A <br>蒋娜娜
%A 邵天敏
%A 陈大融
%J 无机材料学报
%D 2005
%I Science Press
%X Pulsed-laser-arc deposition technique was introduced. Diamond like carbon (DLC) films were deposited on Si<111> and Si<100> respectively. Results of laser raman spectroscopy showed that the as-deposit films were amorphous, having obvious sp3 structure. Meanwhile, surface topography and micro-tribological character were investigated by using atomic force microscope and nano-scratch tester. The results show that the surface microstructure and micro-tribological character of the film deposited on Si<100> is better than that deposited on Si<111>. The average friction coefficient of the film on Si<100> is 0.036.
%K pulsed-laser-arc
%K diamond like carbon film
%K laser raman spectroscopy
%K friction coefficient<br>脉冲激光真空弧
%K 类金刚石薄膜
%K 激光拉曼
%K 摩擦系数
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=A735110E8972DA62&yid=2DD7160C83D0ACED&vid=A04140E723CB732E&iid=CA4FD0336C81A37A&sid=3E0812ED84A7B31D&eid=C29816B2656377A7&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=2&reference_num=20