Structure and Properties of Graphite-like Carbon by Ion Beam Assisted Magnetron Sputtering Deposition
离子束辅助磁控溅射制备类石墨碳膜的结构与性能研究

High hardness and low electrical resistivity graphite-like carbon (GLC) coatings were prepared by ion beam assisted magnetron sputtering deposition (IBMSD). TEM, XRD, XPS, FTIR, four probe electric receptivity measurement method (FPM), RBS, hardness and AFM were used to sense the structures and evaluate the properties of the carbon coatings. The effects of assisted gaseous and bombarding energies on structures and properties of the coatings were investigated. Some significant results were obtained as follows. The bond structure of GLC is mainly sp2 , which can be proved by XPS, FTIR and FPM. XRD and TEM show that its microstructure is amorphous. As CH4 introduced, additional carbon input results in the increase of deposition rate. The surface roughness and hardness are dependent on bombarding energies.