%0 Journal Article
%T Structure and Properties of Graphite-like Carbon by Ion Beam Assisted Magnetron Sputtering Deposition<br>离子束辅助磁控溅射制备类石墨碳膜的结构与性能研究
%A ZHAO-Lei
%A FU Yong-Hui
%A LIU Deng-Yi
%A ZHU Xiao-Dong
%A HE Jia-Wen
%A <br>赵蕾
%A 付永辉
%A 刘登益
%A 朱晓东
%A 何家文
%J 无机材料学报
%D 2005
%I Science Press
%X High hardness and low electrical resistivity graphite-like carbon (GLC) coatings were prepared by ion beam assisted magnetron sputtering deposition (IBMSD). TEM, XRD, XPS, FTIR, four probe electric receptivity measurement method (FPM), RBS, hardness and AFM were used to sense the structures and evaluate the properties of the carbon coatings. The effects of assisted gaseous and bombarding energies on structures and properties of the coatings were investigated. Some significant results were obtained as follows. The bond structure of GLC is mainly sp2 , which can be proved by XPS, FTIR and FPM. XRD and TEM show that its microstructure is amorphous. As CH4 introduced, additional carbon input results in the increase of deposition rate. The surface roughness and hardness are dependent on bombarding energies.
%K ion beam assisted deposition (IBAD)
%K magnetron sputtering
%K amorphous carbon coating
%K structure<br>离子束辅助沉积（IBAD）
%K 磁控溅射
%K 类石墨碳膜
%K 结构
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=84529CA2B2E519AC&jid=ABC0063016AF57E1C73EF43C8D2212BD&aid=7E7C834D5A0A977D&yid=2DD7160C83D0ACED&vid=A04140E723CB732E&iid=CA4FD0336C81A37A&sid=7EBE588F611589FC&eid=50BBDFAC8381694B&journal_id=1000-324X&journal_name=无机材料学报&referenced_num=4&reference_num=11