Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell model
有限尺寸方靶等离子体离子注入动力学的三维粒子模拟研究

Plasma immersion ion implantation (PIII) of the square target with finite length is simulated using a three-dimensional particle-in-cell (PIC) plasma simulation in this paper.The incident dose,the impact angle and the implanted energy on the target surface are investigated.The results show that the sheath around the square target with finite length becomes spherical rapidly during PIII.And the three-dimensional sheath width is small apparently compared with the one simulated by two-dimensional PIC.And it is...