%0 Journal Article
%T Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell model<br>有限尺寸方靶等离子体离子注入动力学的三维粒子模拟研究
%A Wang Peng
%A Tian Xiu-Bo
%A Wang Zhi-Jian
%A Gong Chun-Zhi
%A Yang Shi-Qin
%A <br>王蓬
%A 田修波
%A 汪志健
%A 巩春志
%A 杨士勤
%J 物理学报
%D 2011
%I 
%X Plasma immersion ion implantation (PIII) of the square target with finite length is simulated using a three-dimensional particle-in-cell (PIC) plasma simulation in this paper.The incident dose,the impact angle and the implanted energy on the target surface are investigated.The results show that the sheath around the square target with finite length becomes spherical rapidly during PIII.And the three-dimensional sheath width is small apparently compared with the one simulated by two-dimensional PIC.And it is...
%K plasma immersion ion implantation
%K numerical simulation
%K three-dimensional particle-in-cell
%K cubic target with finite length<br>等离子体浸没离子注入
%K 数值模拟
%K 三维粒子模拟
%K 有限尺寸方靶
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=95DC14E13B3C2ACCEFE9198D181DC3AD&yid=9377ED8094509821&vid=BFE7933E5EEA150D&iid=5D311CA918CA9A03&sid=49A06E5371BEC2A0&eid=49A06E5371BEC2A0&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=15