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物理学报 2010
Model of intrinsic carrier concentration of strained Si/(001)Si_(1-x)Ge_x
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Abstract:
There is great interest in using the strained Si CMOS technology lately for carrier mobility enhancement. Intrinsic carrier concentration is the important physical parameter for the characterization of strained Si materials and the determination of the electrical properties of strained Si-based devices. Starting from analyzing the band structure of strained Si/(001)Si_1-xGe_x,the model of its intrinsic carrier concentration related to Ge fraction (x) at 300K was established with the frame of K.P theory,whic...