Realization of the broad angular spectrum of multilayer dielectric gratings based on the leaky mode resonance
基于泄漏模共振的多层介质膜光栅宽角谱特性实现

Based on the leaky mode resonance theory,the physical mechanism of producing the broad angular spectrum of Multilayer Dielectric Grating (MDG) in the -1 st order reflection diffraction direction is presented in this paper.It is found that the thin match layer would improve the bandwidth of angular spectrum effectively.A good result of ±11 degree near Littrow angle 37.9 over 90% diffraction efficiency centered at 1040nm is obtained,and the parameters of the result have excellent fabrication tolerance.The Fourier modal method is employed for calculating the diffraction efficiency.